Invention Grant
US08476608B2 Compact high precision adjustable beam defining aperture 有权
紧凑型高精度可调光束定义光圈

Compact high precision adjustable beam defining aperture
Abstract:
The present invention provides an adjustable aperture for limiting the dimension of a beam of energy. In an exemplary embodiment, the aperture includes (1) at least one piezoelectric bender, where a fixed end of the bender is attached to a common support structure via a first attachment and where a movable end of the bender is movable in response to an actuating voltage applied to the bender and (2) at least one blade attached to the movable end of the bender via a second attachment such that the blade is capable of impinging upon the beam. In an exemplary embodiment, the beam of energy is electromagnetic radiation. In an exemplary embodiment, the beam of energy is X-rays.
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