Invention Grant
US08476672B2 Electrostatic discharge protection device and method for fabricating the same 有权
静电放电保护装置及其制造方法

  • Patent Title: Electrostatic discharge protection device and method for fabricating the same
  • Patent Title (中): 静电放电保护装置及其制造方法
  • Application No.: US13201370
    Application Date: 2011-04-02
  • Publication No.: US08476672B2
    Publication Date: 2013-07-02
  • Inventor: Ru HuangLijie Zhang
  • Applicant: Ru HuangLijie Zhang
  • Applicant Address: CN Beijing
  • Assignee: Peking University
  • Current Assignee: Peking University
  • Current Assignee Address: CN Beijing
  • Agency: Maschoff Brennan
  • Priority: CN201010163416 20100505
  • International Application: PCT/CN2011/072409 WO 20110402
  • International Announcement: WO2011/137701 WO 20111110
  • Main IPC: H01L29/86
  • IPC: H01L29/86 H01L21/329
Electrostatic discharge protection device and method for fabricating the same
Abstract:
The present invention provides an ESD protection device comprising a SCR structure that is a transverse PNPN structure formed by performing a P-type implantation and an N-type implantation in an N-well and a P-well on a silicon substrate, respectively, wherein a P-type doped region in the N-well is used as an anode, and N-type doped region in the P-well is used as a cathode, characterized in that, N-type dopants are implanted into the N-well to form one lead-out terminal of a resistor, P-type dopants are implanted into the P-well to form another lead-out terminal for the resistor, and the two leading-out terminals are connected by the resistor.
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