Invention Grant
- Patent Title: Electrostatic discharge protection device and method for fabricating the same
- Patent Title (中): 静电放电保护装置及其制造方法
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Application No.: US13201370Application Date: 2011-04-02
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Publication No.: US08476672B2Publication Date: 2013-07-02
- Inventor: Ru Huang , Lijie Zhang
- Applicant: Ru Huang , Lijie Zhang
- Applicant Address: CN Beijing
- Assignee: Peking University
- Current Assignee: Peking University
- Current Assignee Address: CN Beijing
- Agency: Maschoff Brennan
- Priority: CN201010163416 20100505
- International Application: PCT/CN2011/072409 WO 20110402
- International Announcement: WO2011/137701 WO 20111110
- Main IPC: H01L29/86
- IPC: H01L29/86 ; H01L21/329

Abstract:
The present invention provides an ESD protection device comprising a SCR structure that is a transverse PNPN structure formed by performing a P-type implantation and an N-type implantation in an N-well and a P-well on a silicon substrate, respectively, wherein a P-type doped region in the N-well is used as an anode, and N-type doped region in the P-well is used as a cathode, characterized in that, N-type dopants are implanted into the N-well to form one lead-out terminal of a resistor, P-type dopants are implanted into the P-well to form another lead-out terminal for the resistor, and the two leading-out terminals are connected by the resistor.
Public/Granted literature
- US20120018775A1 ELECTROSTATIC DISCHARGE PROTECTION DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2012-01-26
Information query
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