Invention Grant
- Patent Title: Corner layout for superjunction device
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Application No.: US12709114Application Date: 2010-02-19
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Publication No.: US08476698B2Publication Date: 2013-07-02
- Inventor: Lingpeng Guan , Anup Bhalla , Tinggang Zhu , Madhur Bobde
- Applicant: Lingpeng Guan , Anup Bhalla , Tinggang Zhu , Madhur Bobde
- Applicant Address: US CA Sunnyvale
- Assignee: Alpha and Omega Semiconductor Incorporated
- Current Assignee: Alpha and Omega Semiconductor Incorporated
- Current Assignee Address: US CA Sunnyvale
- Agency: JDI Patent
- Agent Joshua D. Isenberg
- Main IPC: H01L29/72
- IPC: H01L29/72
Abstract:
A superjunction device and methods for layout design and fabrication of a superjunction device are disclosed. A layout of active cell column structures can be configured so that a charge due to first conductivity type dopants balances out charge due to second conductivity type dopants in a doped layer in an active cell region. A layout of end portions of the active cell column structures proximate termination column structures can be configured so that a charge due to the first conductivity type dopants in the end portions and a charge due to the first conductivity type dopants in the termination column structures balances out charge due to the second conductivity type dopants in a portion of the doped layer between the termination column structures and the end portions.
Public/Granted literature
- US20110204442A1 CORNER LAYOUT FOR SUPERJUNCTION DEVICE Public/Granted day:2011-08-25
Information query
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