Invention Grant
- Patent Title: Method for producing semiconductor device and semiconductor device
- Patent Title (中): 半导体器件和半导体器件的制造方法
-
Application No.: US13414039Application Date: 2012-03-07
-
Publication No.: US08476699B2Publication Date: 2013-07-02
- Inventor: Fujio Masuoka , Nozomu Harada
- Applicant: Fujio Masuoka , Nozomu Harada
- Applicant Address: SG Singapore
- Assignee: Unisantis Electronics Singapore Pte. Ltd.
- Current Assignee: Unisantis Electronics Singapore Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Brinks Hofer Gilson & Lione
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L31/062 ; H01L27/14 ; H01L31/06 ; H01L27/108 ; H01L21/00 ; H01L21/46 ; H01L21/461

Abstract:
A method for producing a semiconductor device includes a step of forming a conductor layer and a first semiconductor layer containing a donor impurity or an acceptor impurity on a first semiconductor substrate; a step of forming a second insulating layer so as to cover the first semiconductor layer; a step of thinning the first semiconductor substrate to a predetermined thickness; a step of forming, from the first semiconductor substrate, a pillar-shaped semiconductor having a pillar-shaped structure on the first semiconductor layer; a step of forming a first semiconductor region in the pillar-shaped semiconductor by diffusing the impurity from the first semiconductor layer; and a step of forming a pixel of a solid-state imaging device with the pillar-shaped semiconductor into which the impurity has been diffused.
Public/Granted literature
- US20120228677A1 METHOD FOR PRODUCING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE Public/Granted day:2012-09-13
Information query
IPC分类: