Invention Grant
- Patent Title: Semiconductor device
- Patent Title (中): 半导体器件
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Application No.: US12238556Application Date: 2008-09-26
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Publication No.: US08476702B2Publication Date: 2013-07-02
- Inventor: Naoki Izumi
- Applicant: Naoki Izumi
- Applicant Address: JP Kyoto
- Assignee: Rohm Co., Ltd.
- Current Assignee: Rohm Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Rabin & Berdo, P.C.
- Priority: JP2007-255345 20070928
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78

Abstract:
A semiconductor device according to the present invention includes: a body region of a first conductive type; trenches formed by digging in from a top surface of the body region; gate electrodes embedded in the trenches; source regions of a second conductive type formed at sides of the trenches in a top layer portion of the body region; and body contact regions of the first conductive type, penetrating through the source regions in a thickness direction and contacting the body region. The body contact regions are formed in a zigzag alignment in a plan view. With respect to a column formed by the body contact regions aligned in a predetermined column direction, the trenches are disposed at both sides in a row direction orthogonal to the column direction in a plan view, extend in the column direction, and form meandering lines each connecting a plurality of curved portions so that a predetermined gap in the row direction is formed respectively between adjacent trenches extending in the column direction and between the trenches and the body contact regions.
Public/Granted literature
- US20090096018A1 SEMICONDUCTOR DEVICE Public/Granted day:2009-04-16
Information query
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