Invention Grant
- Patent Title: Method for manufacturing semiconductor device
- Patent Title (中): 制造半导体器件的方法
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Application No.: US13296919Application Date: 2011-11-15
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Publication No.: US08476707B2Publication Date: 2013-07-02
- Inventor: Joong Sik Kim , Sung Woong Chung
- Applicant: Joong Sik Kim , Sung Woong Chung
- Applicant Address: KR Icheon
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Icheon
- Priority: KR10-2008-0068126 20080714
- Main IPC: H01L29/06
- IPC: H01L29/06

Abstract:
A method for manufacturing a semiconductor device comprises including a insulating pattern and a silicon film over a SOI substrate, thereby increasing a reduced volume of a floating body after forming a floating body fin transistor so as to secure a data storage space. The method comprises: forming a insulating pattern and a first silicon film over an upper silicon film of a SOI substrate; and forming a fin structure in the first silicon film.
Public/Granted literature
- US20120061760A1 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE Public/Granted day:2012-03-15
Information query
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