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US08476707B2 Method for manufacturing semiconductor device 失效
制造半导体器件的方法

Method for manufacturing semiconductor device
Abstract:
A method for manufacturing a semiconductor device comprises including a insulating pattern and a silicon film over a SOI substrate, thereby increasing a reduced volume of a floating body after forming a floating body fin transistor so as to secure a data storage space. The method comprises: forming a insulating pattern and a first silicon film over an upper silicon film of a SOI substrate; and forming a fin structure in the first silicon film.
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