Invention Grant
US08476776B2 Semiconductor module, method for fabricating the semiconductor module, and mobile apparatus
有权
半导体模块,半导体模块的制造方法以及移动装置
- Patent Title: Semiconductor module, method for fabricating the semiconductor module, and mobile apparatus
- Patent Title (中): 半导体模块,半导体模块的制造方法以及移动装置
-
Application No.: US12935854Application Date: 2009-03-18
-
Publication No.: US08476776B2Publication Date: 2013-07-02
- Inventor: Ryosuke Usui , Yasunori Inoue , Mayumi Nakasato , Katsumi Ito
- Applicant: Ryosuke Usui , Yasunori Inoue , Mayumi Nakasato , Katsumi Ito
- Applicant Address: JP Osaka
- Assignee: Sanyo Electric Co., Ltd.
- Current Assignee: Sanyo Electric Co., Ltd.
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2008-091644 20080331
- International Application: PCT/JP2009/055307 WO 20090318
- International Announcement: WO2009/122911 WO 20091008
- Main IPC: H01L23/28
- IPC: H01L23/28 ; H01L23/29

Abstract:
A semiconductor module manufacturing method includes a step of bonding a semiconductor wafer, which has a plurality of semiconductor elements each of which has an element electrode formed thereon, on an expansible first insulating resin layer; a step of dicing the semiconductor wafer; a step of expanding the first insulating resin layer to widen a gap between semiconductor elements; a pressure-bonding step of pressure-bonding a metal plate whereupon an electrode is arranged and the semiconductor elements with the widened gaps in between, by having a second insulating resin layer in between, and electrically connecting the electrode and the element electrodes; a step of forming a wiring layer which corresponds to each semiconductor element by selectively removing the metal plate and forming a plurality of semiconductor modules connected by the first insulating resin layer and the second insulating resin layer; and a step of separating the semiconductor modules by cutting the first insulating resin layer and the second insulating resin layer.
Public/Granted literature
- US20110193222A1 SEMICONDUCTOR MODULE, METHOD FOR FABRICATING THE SEMICONDUCTOR MODULE, AND MOBILE APPARATUS Public/Granted day:2011-08-11
Information query
IPC分类: