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US08476918B2 Apparatus and method for wafer level classification of light emitting device 有权
发光器件晶圆级别分类的装置和方法

Apparatus and method for wafer level classification of light emitting device
Abstract:
The present disclosure provides a semiconductor test system. The semiconductor test system includes a wafer stage to hold a wafer having a plurality of light emitting devices (LEDs); a probe test card operable to test each test field of the wafer; and a light detector integrated with the probe test card to collect light from a LED of the wafer.
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