Invention Grant
- Patent Title: MEMS resonator devices
- Patent Title (中): MEMS谐振器装置
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Application No.: US13241638Application Date: 2011-09-23
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Publication No.: US08476990B2Publication Date: 2013-07-02
- Inventor: Bernhard Winkler , Mohsin Nawaz , Florian Schoen
- Applicant: Bernhard Winkler , Mohsin Nawaz , Florian Schoen
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Patterson Thuente Pedersen, P.A.
- Main IPC: H03H9/24
- IPC: H03H9/24 ; H03H9/125
Abstract:
Embodiments are related to micro-electromechanical system (MEMS) devices, systems and methods. In one embodiment, a MEMS resonating device comprises a resonator element configured to provide timing; and at least one passive temperature compensation structure arranged on the resonator element.
Public/Granted literature
- US20120013412A1 MEMS RESONATOR DEVICES Public/Granted day:2012-01-19
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