Invention Grant
US08477319B2 Measuring apparatus 失效
测量装置

Measuring apparatus
Abstract:
A measuring apparatus for measuring a three-dimensional shape includes a light source, a contact tip that is brought into contact with an object to be measured and scans the object to be measured, a holding portion that is movable along the object to be measured, a coupling portion for coupling the contact tip to the holding portion via a flexible support member, and an objective lens supported by the holding portion. In addition, an optical system condenses light provided by the light source on the contact tip via the objective lens, a photodetector receives backscattered light from the contact tip and detects a position of the contact tip that is brought into contact with the object to be measured, a moving unit moves the holding portion, and a position measuring instrument measures a position of the holding portion. The measuring apparatus measures the three-dimensional shape by measuring the position of the holding portion while scanning the object to be measured with the contact tip that is brought into contact with the object to be measured, and the contact tip is provided with a film for reflecting the light condensed thereon.
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