Invention Grant
- Patent Title: Measuring apparatus
- Patent Title (中): 测量装置
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Application No.: US12874279Application Date: 2010-09-02
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Publication No.: US08477319B2Publication Date: 2013-07-02
- Inventor: Ryusuke Nakajima
- Applicant: Ryusuke Nakajima
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2009-207018 20090908
- Main IPC: G01B11/24
- IPC: G01B11/24

Abstract:
A measuring apparatus for measuring a three-dimensional shape includes a light source, a contact tip that is brought into contact with an object to be measured and scans the object to be measured, a holding portion that is movable along the object to be measured, a coupling portion for coupling the contact tip to the holding portion via a flexible support member, and an objective lens supported by the holding portion. In addition, an optical system condenses light provided by the light source on the contact tip via the objective lens, a photodetector receives backscattered light from the contact tip and detects a position of the contact tip that is brought into contact with the object to be measured, a moving unit moves the holding portion, and a position measuring instrument measures a position of the holding portion. The measuring apparatus measures the three-dimensional shape by measuring the position of the holding portion while scanning the object to be measured with the contact tip that is brought into contact with the object to be measured, and the contact tip is provided with a film for reflecting the light condensed thereon.
Public/Granted literature
- US20110058183A1 MEASURING APPARATUS Public/Granted day:2011-03-10
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