Invention Grant
- Patent Title: Transducer structure and method for MEMS devices
- Patent Title (中): MEMS器件的传感器结构和方法
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Application No.: US12859672Application Date: 2010-08-19
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Publication No.: US08477473B1Publication Date: 2013-07-02
- Inventor: Daniel N. Koury, Jr. , Sudheer Sridharamurthy
- Applicant: Daniel N. Koury, Jr. , Sudheer Sridharamurthy
- Applicant Address: US CA San Jose
- Assignee: Mcube Inc.
- Current Assignee: Mcube Inc.
- Current Assignee Address: US CA San Jose
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: H01G5/00
- IPC: H01G5/00

Abstract:
An improved MEMS transducer apparatus and method is provided. The apparatus has a movable base structure including an outer surface region and at least one portion removed to form at least one inner surface region. At least one intermediate anchor structure is disposed within the inner surface region. The apparatus includes an intermediate spring structure operably coupled to the central anchor structure, and at least one portion of the inner surface region. A capacitor element is disposed within the inner surface region.
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