Invention Grant
- Patent Title: Distributed feedback laser having enhanced etch stop features
- Patent Title (中): 分布式反馈激光器具有增强的蚀刻停止特征
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Application No.: US12902000Application Date: 2010-10-11
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Publication No.: US08477817B1Publication Date: 2013-07-02
- Inventor: Ashish K. Verma , Tsurugi Sudo , Sumesh Mani K. Thiyagarajan , David Bruce Young
- Applicant: Ashish K. Verma , Tsurugi Sudo , Sumesh Mani K. Thiyagarajan , David Bruce Young
- Applicant Address: US CA Sunnyvale
- Assignee: Finisar Corporation
- Current Assignee: Finisar Corporation
- Current Assignee Address: US CA Sunnyvale
- Agency: Maschoff Brennan
- Main IPC: H01S5/00
- IPC: H01S5/00
Abstract:
In one example embodiment, a DFB laser includes a substrate, an active region positioned above the substrate, and a grating layer positioned above the active region. The grating layer includes a portion that serves as a primary etch stop layer. The DFB laser also includes a secondary etch stop layer located either above or below the grating layer, and a spacer layer interposed between the grating layer and the active region.
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