Invention Grant
- Patent Title: Scanning probe microscope and method for detecting proximity of probes thereof
- Patent Title (中): 扫描探针显微镜及其探针接近性检测方法
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Application No.: US13380261Application Date: 2010-06-21
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Publication No.: US08479308B2Publication Date: 2013-07-02
- Inventor: Katsuhito Nishimura , Yoichi Kawakami , Mitsuru Funato , Akio Kaneta , Tsuneaki Hashimoto
- Applicant: Katsuhito Nishimura , Yoichi Kawakami , Mitsuru Funato , Akio Kaneta , Tsuneaki Hashimoto
- Applicant Address: JP Kyoto
- Assignee: Kyoto University
- Current Assignee: Kyoto University
- Current Assignee Address: JP Kyoto
- Agency: Oliff & Berridge, PLC
- Priority: JP2009-149205 20090623; JP2010-025975 20100208
- International Application: PCT/JP2010/060494 WO 20100621
- International Announcement: WO2010/150756 WO 20101229
- Main IPC: G01Q10/00
- IPC: G01Q10/00

Abstract:
A scanning probe microscope includes: a first and second probes for scanning a sample while maintaining the distance to the sample surface; crystal oscillators holding each of the first and second probes; and a modulation oscillator for providing the first probe with a vibration of a specific frequency which is different from the resonant frequency of each crystal oscillator. A control unit monitors the vibration of the specific frequency of the first and second probes, detects proximity of the first probe and the second probe to each other based on the change of the specific frequencies, and controls the drive of the first and second probes.
Public/Granted literature
- US20120124706A1 SCANNING PROBE MICROSCOPE AND METHOD FOR DETECTING PROXIMITY OF PROBES THEREOF Public/Granted day:2012-05-17
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