Invention Grant
- Patent Title: Dynamic probe detection system
- Patent Title (中): 动态探头检测系统
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Application No.: US13133339Application Date: 2009-12-11
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Publication No.: US08479310B2Publication Date: 2013-07-02
- Inventor: Andrew Humphris
- Applicant: Andrew Humphris
- Applicant Address: GB Oxfordshire
- Assignee: Infinitesima Ltd.
- Current Assignee: Infinitesima Ltd.
- Current Assignee Address: GB Oxfordshire
- Agency: Volpe and Koenig, P.C.
- Priority: GB0822603.7 20081211; GB0906987.3 20090423
- International Application: PCT/GB2009/051701 WO 20091211
- International Announcement: WO2010/067129 WO 20100617
- Main IPC: G01Q20/02
- IPC: G01Q20/02 ; G01Q10/04 ; G01B11/02

Abstract:
A dynamic probe detection system (29,32) is for use with a scanning probe microscope of the type that includes a probe (18) that is moved repeatedly towards and away from a sample surface. As a sample surface is scanned, an interferometer (88) generates an output height signal indicative of a path difference between light reflected from the probe (80a,80b,80c) and a height reference beam. Signal processing apparatus monitors the height signal and derives a measurement for each oscillation cycle that is indicative of the height of the probe. This enables extraction of a measurement that represents the height of the sample, without recourse to averaging or filtering, that may be used to form an image of the sample. The detection system may also include a feedback mechanism that is operable to maintain the average value of a feedback parameter at a set level.
Public/Granted literature
- US20110247106A1 DYNAMIC PROBE DETECTION SYSTEM Public/Granted day:2011-10-06
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