Invention Grant
US08479575B2 Microgyroscope for determining rotational movements about an X and/or Y and Z axis 有权
用于确定关于X和/或Y和Z轴的旋转运动的微镜

  • Patent Title: Microgyroscope for determining rotational movements about an X and/or Y and Z axis
  • Patent Title (中): 用于确定关于X和/或Y和Z轴的旋转运动的微镜
  • Application No.: US13203554
    Application Date: 2010-02-22
  • Publication No.: US08479575B2
    Publication Date: 2013-07-09
  • Inventor: Volker Kempe
  • Applicant: Volker Kempe
  • Applicant Address: DE Planegg
  • Assignee: Maxim Integrated Products GmbH
  • Current Assignee: Maxim Integrated Products GmbH
  • Current Assignee Address: DE Planegg
  • Agency: North Weber & Baugh LLP
  • Priority: DE102009001244 20090227
  • International Application: PCT/EP2010/052179 WO 20100222
  • International Announcement: WO2010/097356 WO 20100902
  • Main IPC: G01C19/00
  • IPC: G01C19/00
Microgyroscope for determining rotational movements about an X and/or Y and Z axis
Abstract:
The invention relates to a microgyroscope for determining rotational movements about an x-axis and/or a y-axis and a z-axis. Oscillating masses are fastened to a substrate by springs. Drive elements vibrate individual masses in an oscillatory manner in the x-y plane in order to produce Coriolis forces when the substrate is rotated, and sensor elements detect deflections of the masses on account of the Coriolis forces produced. The Individual masses are arranged in two groups that are jointly induced by the drive elements to carry out an oscillating primary movement in the plane of the x-y axis. The masses of the first group allow movements starting from the x-y plane, and the masses of the second group allow movements perpendicular to the oscillating primary movement in the plane of the x-y axis.
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