Invention Grant
- Patent Title: Filter device for the compensation of an asymmetric pupil illumination
- Patent Title (中): 用于补偿不对称瞳孔照明的过滤装置
-
Application No.: US13553005Application Date: 2012-07-19
-
Publication No.: US08480261B2Publication Date: 2013-07-09
- Inventor: Manfred Maul , Damian Fiolka
- Applicant: Manfred Maul , Damian Fiolka
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102004063314 20041223
- Main IPC: F21V9/00
- IPC: F21V9/00 ; G03B27/68

Abstract:
The invention relates to a filter device for an illumination system, especially for the correction of the illumination of the illuminating pupil, including a light source, with the illumination system being passed through by a bundle of illuminating rays from the light source to an object plane, with the bundle of illuminating rays impinging upon the filter device, including at least one filter element which can be introduced into the beam path of the bundle of illuminating rays, with the filter element including an actuating device, so that the filter element can be brought with the help of the actuating device into the bundle of illuminating rays.
Public/Granted literature
- US20120281198A1 FILTER DEVICE FOR THE COMPENSATION OF AN ASYMMETRIC PUPIL ILLUMINATION Public/Granted day:2012-11-08
Information query