Invention Grant
US08480348B2 Thin plate container and processing apparatus for thin plate container 失效
薄板容器和薄板容器的加工设备

  • Patent Title: Thin plate container and processing apparatus for thin plate container
  • Patent Title (中): 薄板容器和薄板容器的加工设备
  • Application No.: US11992588
    Application Date: 2006-09-20
  • Publication No.: US08480348B2
    Publication Date: 2013-07-09
  • Inventor: Yukihiro HyobuAtsushi Osada
  • Applicant: Yukihiro HyobuAtsushi Osada
  • Applicant Address: JP Tokyo
  • Assignee: Miraial Co., Ltd.
  • Current Assignee: Miraial Co., Ltd.
  • Current Assignee Address: JP Tokyo
  • Agency: Bacon & Thomas PLLC
  • Priority: JP2005-288211 20050930
  • International Application: PCT/JP2006/318582 WO 20060920
  • International Announcement: WO2007/040047 WO 20070412
  • Main IPC: B65G1/00
  • IPC: B65G1/00
Thin plate container and processing apparatus for thin plate container
Abstract:
Arbitrary pieces of semiconductor wafers are supported flexibly on either the upper side or the lower side. The present invention is a thin plate container for supporting plural semiconductor wafers for use in carriage, storage, processing, etc. It comprises processing trays plurally stacked in a state of each supporting at least one semiconductor wafer individually and a coupling mechanism for integrally coupling the processing trays in a state where the processing trays are plurally stacked and separating the processing trays at an arbitrary location. Each processing tray has a one-side support for supporting at least one semiconductor wafer on its one side and the other-side support mutually fitted to the one-side support of the other processing tray on the other side to form a housing space sealed off from the external environment for constraining and supporting the thin plate. Accordingly, as many processing trays as the number of the semiconductor wafers are stacked to constitute the thin plate container.
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