Invention Grant
- Patent Title: Method of fabricating a polishing pad
- Patent Title (中): 抛光垫的制造方法
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Application No.: US13160018Application Date: 2011-06-14
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Publication No.: US08480773B2Publication Date: 2013-07-09
- Inventor: Yung-Chung Chang , Shen-Yu Chang , Wen-Chang Shih
- Applicant: Yung-Chung Chang , Shen-Yu Chang , Wen-Chang Shih
- Applicant Address: TW Taichung
- Assignee: IV Technologies Co., Ltd.
- Current Assignee: IV Technologies Co., Ltd.
- Current Assignee Address: TW Taichung
- Agency: Ditthavong Mori & Steiner P.C.
- Priority: TW95115944A 20060504
- Main IPC: B24D3/28
- IPC: B24D3/28

Abstract:
A polishing pad having a compressibility-aiding stripe buried therein is fabricated by assembling the compressibility-aiding stripe in a mold cavity, filling the mold cavity with a polymer material, and releasing the polishing pad from the mold. Embodiments include assembling a compressibility-aiding stripe comprising a solid pillar of material having a larger compressibility than that of the polishing pad body, and releasing a single layer polishing pad from the mold.
Public/Granted literature
- US20110241258A1 METHOD OF FABRICATING A POLISHING PAD Public/Granted day:2011-10-06
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