Invention Grant
US08480773B2 Method of fabricating a polishing pad 有权
抛光垫的制造方法

Method of fabricating a polishing pad
Abstract:
A polishing pad having a compressibility-aiding stripe buried therein is fabricated by assembling the compressibility-aiding stripe in a mold cavity, filling the mold cavity with a polymer material, and releasing the polishing pad from the mold. Embodiments include assembling a compressibility-aiding stripe comprising a solid pillar of material having a larger compressibility than that of the polishing pad body, and releasing a single layer polishing pad from the mold.
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