Invention Grant
- Patent Title: Thin film, method and apparatus for forming the same, and electronic component incorporating the same
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Application No.: US12761036Application Date: 2010-04-15
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Publication No.: US08480804B2Publication Date: 2013-07-09
- Inventor: Kazuyoshi Honda , Masaru Odagiri , Kiyoshi Takahashi , Noriyasu Echigo , Nobuki Sunagare
- Applicant: Kazuyoshi Honda , Masaru Odagiri , Kiyoshi Takahashi , Noriyasu Echigo , Nobuki Sunagare
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: Renner, Otto, Boisselle & Sklar, LLP
- Priority: JP8-125400 19960521; JP9-054760 19970310; JP9-062651 19970317; JP9-081768 19970401
- Main IPC: C23C16/00
- IPC: C23C16/00
Abstract:
A method for forming a thin film includes the steps of: supplying a deposition material in the form of a liquid onto a heated surface; heating and vaporizing the deposition material on the heated surface while the deposition material is undergoing movement; and depositing the deposition material onto a deposition surface. The deposition material is supplied onto a position of the heated surface where the vaporized deposition material does not reach the deposition surface.
Public/Granted literature
- US20100192858A1 THIN FILM, METHOD AND APPARATUS FOR FORMING THE SAME, AND ELECTRONIC COMPONENT INCORPORATING THE SAME Public/Granted day:2010-08-05
Information query
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