Invention Grant
- Patent Title: Carbon nanotube growth method
- Patent Title (中): 碳纳米管生长法
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Application No.: US10552546Application Date: 2004-04-14
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Publication No.: US08481163B2Publication Date: 2013-07-09
- Inventor: Anne-Marie Bonnot , Vincent Bouchiat , Marc Faucher
- Applicant: Anne-Marie Bonnot , Vincent Bouchiat , Marc Faucher
- Assignee: Centre National de la Recherche Scientifique
- Current Assignee: Centre National de la Recherche Scientifique
- Agency: Howard IP Law Group, PC
- Priority: FR0304830 20030417
- International Application: PCT/FR2004/050160 WO 20040414
- International Announcement: WO2004/094690 WO 20041104
- Main IPC: B32B9/00
- IPC: B32B9/00

Abstract:
The invention relates to a method of growing carbon nanotubes (5) on a substrate (1) using a hot-wire-assisted chemical vapor deposition method. The inventive method consists in first depositing a bilayer of titanium (12) and cobalt (13) on the substrate such that: the thickness of the titanium layer is between 0.5 and 5 nm, the thickness of the cobalt layer is between 0.25 and 10 nm, and the thickness of the cobalt layer is between half and double that of the titanium layer.
Public/Granted literature
- US20070110971A1 Carbon nanotube growth method Public/Granted day:2007-05-17
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