Invention Grant
US08481245B2 System, method and apparatus for pattern clean-up during fabrication of patterned media using forced assembly of molecules
失效
使用强制组装分子的图案化介质制造期间图案清理的系统,方法和装置
- Patent Title: System, method and apparatus for pattern clean-up during fabrication of patterned media using forced assembly of molecules
- Patent Title (中): 使用强制组装分子的图案化介质制造期间图案清理的系统,方法和装置
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Application No.: US13333109Application Date: 2011-12-21
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Publication No.: US08481245B2Publication Date: 2013-07-09
- Inventor: Qing Dai , Dan Saylor Kercher , Huey-Ming Tzeng
- Applicant: Qing Dai , Dan Saylor Kercher , Huey-Ming Tzeng
- Applicant Address: NL Amsterdam
- Assignee: HGST Netherlands B.V.
- Current Assignee: HGST Netherlands B.V.
- Current Assignee Address: NL Amsterdam
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
A pattern clean-up for fabrication of patterned media using a forced assembly of molecules is disclosed. E-beam lithography is initially used to write the initial patterned bit media structures, which have size and positioning errors. Nano-sized protein molecules are then forced to assemble of on top of the bits. The protein molecules have a very uniform size distribution and assemble into a lattice structure above the e-beam patterned areas. The protein molecules reduce the size and position errors in e-beam patterned structures. This process cleans the signal from the e-beam lithography and lowers the noise in the magnetic reading and writing. This process may be used to fabricate patterned bit media directly on hard disk, or to create a nano-imprint master for mass production of patterned bit media disks.
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