Invention Grant
US08481345B1 Method to determine the position-dependant metal correction factor for dose-rate equivalent laser testing of semiconductor devices 有权
确定半导体器件的剂量率等效激光测试的位置相关金属校正因子的方法

  • Patent Title: Method to determine the position-dependant metal correction factor for dose-rate equivalent laser testing of semiconductor devices
  • Patent Title (中): 确定半导体器件的剂量率等效激光测试的位置相关金属校正因子的方法
  • Application No.: US12891569
    Application Date: 2010-09-27
  • Publication No.: US08481345B1
    Publication Date: 2013-07-09
  • Inventor: Kevin M. Horn
  • Applicant: Kevin M. Horn
  • Applicant Address: US NM Albuquerque
  • Assignee: Sandia Corporation
  • Current Assignee: Sandia Corporation
  • Current Assignee Address: US NM Albuquerque
  • Agent Kevin W. Bieg
  • Main IPC: H01L21/00
  • IPC: H01L21/00 G01R31/00
Method to determine the position-dependant metal correction factor for dose-rate equivalent laser testing of semiconductor devices
Abstract:
A method reconstructs the charge collection from regions beneath opaque metallization of a semiconductor device, as determined from focused laser charge collection response images, and thereby derives a dose-rate dependent correction factor for subsequent broad-area, dose-rate equivalent, laser measurements. The position- and dose-rate dependencies of the charge-collection magnitude of the device are determined empirically and can be combined with a digital reconstruction methodology to derive an accurate metal-correction factor that permits subsequent absolute dose-rate response measurements to be derived from laser measurements alone. Broad-area laser dose-rate testing can thereby be used to accurately determine the peak transient current, dose-rate response of semiconductor devices to penetrating electron, gamma- and x-ray irradiation.
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