Invention Grant
US08481355B2 Modular system and process for continuous deposition of a thin film layer on a substrate
有权
用于在衬底上连续沉积薄膜层的模块化系统和工艺
- Patent Title: Modular system and process for continuous deposition of a thin film layer on a substrate
- Patent Title (中): 用于在衬底上连续沉积薄膜层的模块化系统和工艺
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Application No.: US12638687Application Date: 2009-12-15
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Publication No.: US08481355B2Publication Date: 2013-07-09
- Inventor: Mark Jeffrey Pavol , Russell Weldon Black , Brian Robert Murphy , Christopher Rathweg , Edwin Jackson Little , Max William Reed
- Applicant: Mark Jeffrey Pavol , Russell Weldon Black , Brian Robert Murphy , Christopher Rathweg , Edwin Jackson Little , Max William Reed
- Applicant Address: US CO Arvada
- Assignee: Primestar Solar, Inc.
- Current Assignee: Primestar Solar, Inc.
- Current Assignee Address: US CO Arvada
- Agency: Dority & Manning, P.A.
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A system and associated process for vapor deposition of a thin film layer on a photovoltaic (PV) module substrate is includes establishing a vacuum chamber and introducing the substrates individually into the vacuum chamber. A conveyor system is operably disposed within the vacuum chamber and is configured for conveying the substrates in a serial arrangement through a vapor deposition apparatus within the vacuum chamber at a controlled constant linear speed. A post-heat section is disposed within the vacuum chamber immediately downstream of the vapor deposition apparatus in the conveyance direction of the substrates. The post-heat section is configured to maintain the substrates conveyed from the vapor deposition apparatus in a desired heated temperature profile until the entire substrate has exited the vapor deposition apparatus.
Public/Granted literature
- US20110143481A1 MODULAR SYSTEM AND PROCESS FOR CONTINUOUS DEPOSITION OF A THIN FILM LAYER ON A SUBSTRATE Public/Granted day:2011-06-16
Information query
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