Invention Grant
US08481388B2 Non-volatile memory device having a nitride-oxide dielectric layer
有权
具有氮化物 - 氧化物电介质层的非易失性存储器件
- Patent Title: Non-volatile memory device having a nitride-oxide dielectric layer
- Patent Title (中): 具有氮化物 - 氧化物电介质层的非易失性存储器件
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Application No.: US12818057Application Date: 2010-06-17
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Publication No.: US08481388B2Publication Date: 2013-07-09
- Inventor: Chao-I Wu , Tzu-Hsuan Hsu , Hang-Ting Lue , Erh-Kun Lai
- Applicant: Chao-I Wu , Tzu-Hsuan Hsu , Hang-Ting Lue , Erh-Kun Lai
- Applicant Address: TW Hsinchu
- Assignee: Macronix International Co., Ltd.
- Current Assignee: Macronix International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Haynes Beffel & Wolfeld LLP
- Agent Kenta Suzue
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A non-volatile memory cell may include a semiconductor substrate; a source region in a portion of the substrate; a drain region within a portion of the substrate; a well region within a portion of the substrate. The memory cell may further include a first carrier tunneling layer over the substrate; a charge storage layer over the first carrier tunneling layer; a second carrier tunneling layer over the charge storage layer; and a conductive control gate over the second carrier tunneling layer. Specifically, the drain region is spaced apart from the source region, and the well region may surround at least a portion of the source and drain regions. In one example, the second carrier tunneling layer provides hole tunneling during an erasing operation and may include at least one dielectric layer.
Public/Granted literature
- US20100311217A1 Non-Volatile Memory Device Having A Nitride-Oxide Dielectric Layer Public/Granted day:2010-12-09
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