Invention Grant
- Patent Title: Memory cell that includes a carbon-based memory element and methods of forming the same
- Patent Title (中): 包含碳基记忆元件的记忆单元及其形成方法
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Application No.: US12717457Application Date: 2010-03-04
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Publication No.: US08481394B2Publication Date: 2013-07-09
- Inventor: Michael Y. Chan , April D. Schricker
- Applicant: Michael Y. Chan , April D. Schricker
- Applicant Address: US CA Milpitas
- Assignee: SanDisk 3D LLC
- Current Assignee: SanDisk 3D LLC
- Current Assignee Address: US CA Milpitas
- Agency: Dugan & Dugan, PC
- Main IPC: H01L21/20
- IPC: H01L21/20

Abstract:
In a first aspect, a method of forming a memory cell is provided that includes: (a) forming a layer of dielectric material above a substrate; (b) forming an opening in the dielectric layer; (c) depositing a solution that includes a carbon-based switching material on the substrate; (d) rotating the substrate to cause the solution to flow into the opening and to form a carbon-based switching material layer within the opening; and (e) forming a memory element using the carbon-based switching material layer. Numerous other aspects are provided.
Public/Granted literature
- US20110215320A1 MEMORY CELL THAT INCLUDES A CARBON-BASED MEMORY ELEMENT AND METHODS OF FORMING THE SAME Public/Granted day:2011-09-08
Information query
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