Invention Grant
US08481394B2 Memory cell that includes a carbon-based memory element and methods of forming the same 有权
包含碳基记忆元件的记忆单元及其形成方法

Memory cell that includes a carbon-based memory element and methods of forming the same
Abstract:
In a first aspect, a method of forming a memory cell is provided that includes: (a) forming a layer of dielectric material above a substrate; (b) forming an opening in the dielectric layer; (c) depositing a solution that includes a carbon-based switching material on the substrate; (d) rotating the substrate to cause the solution to flow into the opening and to form a carbon-based switching material layer within the opening; and (e) forming a memory element using the carbon-based switching material layer. Numerous other aspects are provided.
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