Invention Grant
- Patent Title: Method for manufacturing a micromechanical component, and micromechanical component
- Patent Title (中): 微机械部件的制造方法以及微机电部件
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Application No.: US11921999Application Date: 2006-04-27
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Publication No.: US08481427B2Publication Date: 2013-07-09
- Inventor: Hans Artmann , Andrea Urban , Arnim Hoechst
- Applicant: Hans Artmann , Andrea Urban , Arnim Hoechst
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102005029803 20050627
- International Application: PCT/EP2006/061898 WO 20060427
- International Announcement: WO2007/000363 WO 20070104
- Main IPC: H01L21/302
- IPC: H01L21/302

Abstract:
A micromechanical method for manufacturing a cavity in a substrate, and a micromechanical component manufactured with this method. In this method, in a first step a first layer is produced on or in a substrate. At least one second layer is then applied onto the first layer. An access hole is produced in this second layer. Material of the first layer and of the substrate can be dissolved out through this hole, so that a cavity is produced in the substrate beneath at least a portion of the second layer. This second layer above the cavity can subsequently be used as a membrane. In addition, the possibility also exists of depositing further layers onto the second layer, only the totality of which layers constitutes the membrane. The material of the first layer is selected so that dissolving out the material of the first layer produces a transition edge in the first layer, which edge at is at a predefinable angle between the substrate and the second layer.
Public/Granted literature
- US20100260974A1 Method for Manufacturing a Micromechanical Component, and Micromechanical Component Public/Granted day:2010-10-14
Information query
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