Invention Grant
US08481892B2 Ceramic heater and method for producing same 有权
陶瓷加热器及其制造方法

Ceramic heater and method for producing same
Abstract:
A method for producing a ceramic heater includes performing firing at 1,600° C. to 1,750° C. in a state in which front and back surfaces of an inner shaped body composed of low-temperature sinterable raw material powder containing aluminum nitride powder as a main component and 0.03% to 1% by weight of rare earth oxide powder are sandwiched between a pair of outer layers composed of aluminum nitride sintered bodies having a volume resistivity of 1015 Ωcm or more through resistive heating elements composed of metal meshes, thereby obtaining a ceramic heater.
Public/Granted literature
Information query
Patent Agency Ranking
0/0