Invention Grant
- Patent Title: Method and device for examining a surface of an object
- Patent Title (中): 用于检查物体表面的方法和装置
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Application No.: US12460166Application Date: 2009-07-14
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Publication No.: US08481933B2Publication Date: 2013-07-09
- Inventor: Michael Albiez , Wolfram Buhler
- Applicant: Michael Albiez , Wolfram Buhler
- Applicant Address: DE Jena
- Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee Address: DE Jena
- Agency: Muirhead and Saturnelli, LLC
- Priority: DE102008040426 20080715
- Main IPC: H01J37/26
- IPC: H01J37/26
Abstract:
A method for treating a surface of an object and a device suitable in particular for performing this method provide for examining the surface of the object with the aid of a particle beam to counteract the charge buildup on the object. A gas is supplied to convey the charge away from the surface and/or to neutralize it.
Public/Granted literature
- US20100102223A1 Method and device for examining a surface of an object Public/Granted day:2010-04-29
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