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US08481953B2 Methods and systems of isolating segmented radiation detectors using alumina 有权
使用氧化铝隔离分段辐射探测器的方法和系统

Methods and systems of isolating segmented radiation detectors using alumina
Abstract:
Radiation detectors can be made of n-type or p-type silicon. All segmented detectors on p-type silicon and double-sided detectors on n-type silicon require an “inter-segment isolation” to separate the n-type strips from each other; an alumina layer for isolating the strip detectors is applied, and forms negative charges at the silicon interface with appropriate densities. When alumina dielectric is deposited on silicon, the negative interface charge acts like an effective p-stop or p-spray barrier because electrons are “pushed” away from the interface due to the negative interface charge.
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