Invention Grant
US08481958B2 Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens
有权
使用复合透镜的多轴透镜，光束系统以及复合透镜的制造方法
- Patent Title: Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens
- Patent Title (中): 使用复合透镜的多轴透镜，光束系统以及复合透镜的制造方法
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Application No.: US12856152Application Date: 2010-08-13
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Publication No.: US08481958B2Publication Date: 2013-07-09
- Inventor: Stefan Lanio
- Applicant: Stefan Lanio
- Applicant Address: DE Heimstetten
- Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
- Current Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
- Current Assignee Address: DE Heimstetten
- Agency: Patterson & Sheridan, LLP
- Priority: EP10172528 20100811
- Main IPC: G21K5/04
- IPC: G21K5/04
Abstract:
A lens system for a plurality of charged particle beams comprises a lens body with a first pole piece, a second pole piece and a plurality of lens openings for the respective charged particle beams; a common excitation coil arranged around the plurality of lens openings for providing a respective first magnetic flux to the lens openings; and a compensation coil arranged between the lens openings for providing a respective second magnetic flux to at least some of the lens openings so as to compensate for an asymmetry of the first magnetic flux.
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