Invention Grant
US08481967B2 Method of processing objects by focused ion beam system and carrier used therewith
有权
通过聚焦离子束系统和使用的载体处理物体的方法
- Patent Title: Method of processing objects by focused ion beam system and carrier used therewith
- Patent Title (中): 通过聚焦离子束系统和使用的载体处理物体的方法
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Application No.: US12481772Application Date: 2009-06-10
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Publication No.: US08481967B2Publication Date: 2013-07-09
- Inventor: Shen-Chuan Lo , Ming-Wei Lai , Shi-Ri Lee , Li-Jiaun Lin
- Applicant: Shen-Chuan Lo , Ming-Wei Lai , Shi-Ri Lee , Li-Jiaun Lin
- Applicant Address: TW Hsinchu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsinchu
- Agency: Rabin & Berdo, P.C.
- Priority: TW97151170A 20081229
- Main IPC: G21K5/00
- IPC: G21K5/00

Abstract:
A method of processing objects by a FIB (Focused Ion Beam) system and a carrier used therewith are provided. The carrier includes a carrying member and a processing portion having an object disposed thereon. Before the carrier is disposed into the FIB system, the carrying member is set to be flush in height with the processing portion having the object disposed thereon. After an eucentric height adjustment inside the FIB system, both the carrying member and the processing portion are in a same plane with the eucentric point of the system. Therefore, after the object on the processing portion is processed, a processed object or a processed block of the object can be moved to the carrying member without performing further eucentric height adjustment with respect to the carrying member.
Public/Granted literature
- US20100163752A1 METHOD OF PROCESSING OBJECTS BY FOCUSED ION BEAM SYSTEM AND CARRIER USED THEREWITH Public/Granted day:2010-07-01
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