Invention Grant
- Patent Title: Electron microscope specimen and method for preparing the same
- Patent Title (中): 电子显微镜样品及其制备方法
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Application No.: US12954916Application Date: 2010-11-29
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Publication No.: US08481968B2Publication Date: 2013-07-09
- Inventor: Jian-Shing Luo , Wen-Shan Hsu
- Applicant: Jian-Shing Luo , Wen-Shan Hsu
- Applicant Address: TW Hwa-Ya Technology Park Kueishan, Taoyuan
- Assignee: Inotera Memories, Inc.
- Current Assignee: Inotera Memories, Inc.
- Current Assignee Address: TW Hwa-Ya Technology Park Kueishan, Taoyuan
- Agent Winston Hsu; Scott Margo
- Priority: TW99117585A 20100601
- Main IPC: G21K5/00
- IPC: G21K5/00 ; H01J37/26
Abstract:
A method for preparing an electron microscope specimen is provided. The method includes providing a wafer sample with an analysis region disposed thereon. A dicing process is performed to cut a sample piece from the wafer sample. The sample piece includes a target pillar structure wherein the analysis region is located on a top portion of the target pillar structure. A thinning process is performed to thin the top portion of the target pillar structure. The invention further provides an electron microscope specimen and a method of forming a 3D image.
Public/Granted literature
- US20110291008A1 ELECTRON MICROSCOPE SPECIMEN AND METHOD FOR PREPARING THE SAME Public/Granted day:2011-12-01
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