Invention Grant
US08482035B2 Enhancement mode III-nitride transistors with single gate Dielectric structure
有权
具有单栅极电介质结构的增强型III族氮化物晶体管
- Patent Title: Enhancement mode III-nitride transistors with single gate Dielectric structure
- Patent Title (中): 具有单栅极电介质结构的增强型III族氮化物晶体管
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Application No.: US13017970Application Date: 2011-01-31
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Publication No.: US08482035B2Publication Date: 2013-07-09
- Inventor: Michael A. Briere
- Applicant: Michael A. Briere
- Applicant Address: US CA El Segundo
- Assignee: International Rectifier Corporation
- Current Assignee: International Rectifier Corporation
- Current Assignee Address: US CA El Segundo
- Agency: Farjami & Farjami LLP
- Main IPC: H01L21/8232
- IPC: H01L21/8232 ; H01L29/778

Abstract:
According to one embodiment, a III-nitride transistor includes a conduction channel formed between first and second III-nitride bodies, the conduction channel including a two-dimensional electron gas. The transistor also includes at least one gate dielectric layer having a charge confined within to cause an interrupted region of the conduction channel and a gate electrode operable to restore the interrupted region of the conduction channel. The transistor can be an enhancement mode transistor. In one embodiment, the gate dielectric layer is a silicon nitride layer. In another embodiment, the at least one gate dielectric layer is a silicon oxide layer. The charge can be ion implanted into the at least one gate dielectric layer. The at least one gate dielectric layer can also be grown with the charge.
Public/Granted literature
- US20110121313A1 Enhancement Mode III-Nitride Transistors with Single Gate Dielectric Structure Public/Granted day:2011-05-26
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