Invention Grant
- Patent Title: Semiconductor memory device having vertical channel transistor and method for fabricating the same
- Patent Title (中): 具有垂直沟道晶体管的半导体存储器件及其制造方法
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Application No.: US13549648Application Date: 2012-07-16
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Publication No.: US08482045B2Publication Date: 2013-07-09
- Inventor: Hyeoung-won Seo , Bong-soo Kim , Dong-gun Park , Kang-yoon Lee , Jae-man Yoon , Seong-goo Kim , Seung-bae Park
- Applicant: Hyeoung-won Seo , Bong-soo Kim , Dong-gun Park , Kang-yoon Lee , Jae-man Yoon , Seong-goo Kim , Seung-bae Park
- Applicant Address: JP Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: JP Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Agency: Muir Patent Consulting, PLLC
- Priority: KR10-2005-0110124 20051117; KR10-2006-0088187 20060912
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L21/8242

Abstract:
Channels of two transistors are vertically formed on portions of two opposite side surfaces of one active region, and gate electrodes are vertically formed on a device isolation layer contacting the channels of the active region. A common bit line contact plug is formed in the central portions of the active region, two storage node contact plugs are formed on both sides of the bit line contact plug, and an insulating spacer is formed on a side surface of the bit line contact plug. A word line, a bit line, and a capacitor are sequentially stacked on the semiconductor substrate, like a conventional semiconductor memory device. Thus, effective space arrangement of a memory cell is possible such that a 4F2 structure is constituted, and a conventional line and contact forming process can be applied such that highly integrated semiconductor memory device is readily fabricated.
Public/Granted literature
- US20120273898A1 SEMICONDUCTOR MEMORY DEVICE HAVING VERTICAL CHANNEL TRANSISTOR AND METHOD FOR FABRICATING THE SAME Public/Granted day:2012-11-01
Information query
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