Invention Grant
US08482046B2 Concentric or nested container capacitor structure for integrated circuits
有权
用于集成电路的同心或嵌套容器电容器结构
- Patent Title: Concentric or nested container capacitor structure for integrated circuits
- Patent Title (中): 用于集成电路的同心或嵌套容器电容器结构
-
Application No.: US13215529Application Date: 2011-08-23
-
Publication No.: US08482046B2Publication Date: 2013-07-09
- Inventor: Werner Juengling
- Applicant: Werner Juengling
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Schwegman, Lundberg & Woessner, P.A.
- Main IPC: H01L31/062
- IPC: H01L31/062

Abstract:
Disclosed are embodiments for a container capacitor structure in which at least two container capacitors, e.g., an inner and outer container capacitor, are made concentric and nested with respect to one another. The nested capacitors are formed in one embodiment by defining a hole in a dielectric layer for the nested container capacitors in the vicinity of two capacitor contact plugs. An outer capacitor plate is formed by etching back poly 1 to leave it substantially on the vertical edges of the hole and in contact with one of the plugs. At least one sacrificial sidewall is formed on the poly 1, and poly 2 is deposited over the sidewalls to form an inner capacitor plate in contact with the other plug. The structure is planarized, the sacrificial sidewalls are removed, a capacitor dielectric is formed, and is topped with poly 3. Additional structures such as a protective layer (to prevent poly 1-to-poly 2 shorting) and a conductive layer (to strap the plugs to their respective poly layers) can also be used.
Public/Granted literature
- US20110303957A1 Concentric or Nested Container Capacitor Structure for Integrated Circuits Public/Granted day:2011-12-15
Information query
IPC分类: