Invention Grant
- Patent Title: Semiconductor apparatus and manufacturing method thereof
- Patent Title (中): 半导体装置及其制造方法
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Application No.: US12956376Application Date: 2010-11-30
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Publication No.: US08482081B2Publication Date: 2013-07-09
- Inventor: Mitsuo Tanaka
- Applicant: Mitsuo Tanaka
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2009-273525 20091201
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/8249

Abstract:
A high-performance semiconductor apparatus which can be easily introduced into the MOS process, reduces the leakage current (electric field strength) between the emitter and the base, and is insusceptible to noise or surge voltage, and a manufacturing method of the semiconductor apparatus. The emitter 111 is formed by performing the ion implantation twice by using the conductive film (109) as a mask. The second emitter area (111b) is formed by ion implantation of a low impurity density impurity ion, and the first emitter area (111a) is formed by ion implantation of a high impurity density impurity ion. As a result, the low impurity density second emitter area is formed in the circumference of the emitter 111, which lowers the electric field strength, and reduces the leakage current. Also the conductive film is connected with the emitter electrode (116), which makes the apparatus insusceptible to noise.
Public/Granted literature
- US20110127615A1 SEMICONDUCTOR APPARATUS AND MANUFACTURING METHOD THEREOF Public/Granted day:2011-06-02
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