Invention Grant
- Patent Title: Charged particle collector for a CMOS imager
- Patent Title (中): 用于CMOS成像器的带电粒子收集器
-
Application No.: US12837033Application Date: 2010-07-15
-
Publication No.: US08482090B2Publication Date: 2013-07-09
- Inventor: Dan Wesley Chilcott , William J. Baney , John Richard Troxell
- Applicant: Dan Wesley Chilcott , William J. Baney , John Richard Troxell
- Applicant Address: US VA McLean
- Assignee: Exelis, Inc.
- Current Assignee: Exelis, Inc.
- Current Assignee Address: US VA McLean
- Agency: RatnerPrestia
- Main IPC: H01L31/115
- IPC: H01L31/115
Abstract:
Charged particle sensing devices and methods of forming charged particle sensing devices are provided. The charged particle sensing device includes a source of charged particles, a plurality of collector electrodes for receiving a first portion of the charged particles and a grid formed around and spaced apart from the plurality of collector electrodes. The grid receives a second portion of the charged particles and directs backscattered charged particles, generated responsive to the second portion, to adjacent collector electrodes.
Public/Granted literature
- US20120012958A1 CHARGED PARTICLE COLLECTOR FOR A CMOS IMAGER Public/Granted day:2012-01-19
Information query
IPC分类:
