Invention Grant
- Patent Title: Method for producing ceramic passivation layers on silicon for solar cell manufacture
- Patent Title (中): 太阳能电池制造用硅制造陶瓷钝化层的方法
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Application No.: US13060324Application Date: 2009-08-26
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Publication No.: US08482106B2Publication Date: 2013-07-09
- Inventor: Klaus Rode , Hartmut Wiezer
- Applicant: Klaus Rode , Hartmut Wiezer
- Assignee: AZ Electronic Materials (Luxembourg) S.A.R.L.
- Current Assignee: AZ Electronic Materials (Luxembourg) S.A.R.L.
- Agent Sangya Jain
- International Application: PCT/EP2009/006160 WO 20090826
- International Announcement: WO2010/022916 WO 20100304
- Main IPC: H01L23/58
- IPC: H01L23/58

Abstract:
The invention relates to a method for producing passivation layers on crystalline silicon by a) coating the silicon with a solution containing at least one polysilazane of the general formula (1): —(SiR′R″—NR′″)-n, wherein R′, R″, R′″ are the same or different and stand independently of each other for hydrogen or a possibly substituted alkyl, aryl, vinyl, or (trialkoxysilyl)alkyl group, wherein n is an integer and n is chosen such that the polysilazane has a number average molecular weight of 150 to 150,000 g/mol, b) subsequently removing the solvent by evaporation, whereby polysilazane layers of 50-500 nm thickness remain on the silicon wafer, and c) heating the polysilazane layer at normal pressure to 200-1000° C. in the presence of air or nitrogen, wherein upon tempering the ceramic layers release hydrogen for bulk passivation of the silicon.
Public/Granted literature
- US20110156221A1 Method For Producing Ceramic Passivation Layers on Silicon For Solar Cell Manufacture Public/Granted day:2011-06-30
Information query
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