Invention Grant
- Patent Title: Pad bonding employing a self-aligned plated liner for adhesion enhancement
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Application No.: US12575980Application Date: 2009-10-08
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Publication No.: US08482132B2Publication Date: 2013-07-09
- Inventor: Chih-Chao Yang , David V. Horak , Takeshi Nogami , Shom Ponoth
- Applicant: Chih-Chao Yang , David V. Horak , Takeshi Nogami , Shom Ponoth
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Parashos Kalaitzis, Esq.
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/52 ; H01L29/40

Abstract:
Two substrates are brought together and placed in a plating bath. In one embodiment, a conductive material is plated in microscopic cavities present at the interface between a first metal pad and a second metal pad to form at least one interfacial plated metal liner portion that adheres to a surface of the first metal pad and a surface of the second metal pad. In another embodiment, at least one metal pad is recessed relative to a dielectric surface before being brought together. The two substrates are placed in a plating bath and a conductive material is plated in the cavity between the first metal pad and the second metal pad to form a contiguous plated metal liner layer that adheres to a surface of the first metal pad and a surface of the second metal pad.
Public/Granted literature
- US20110084403A1 PAD BONDING EMPLOYING A SELF-ALIGNED PLATED LINER FOR ADHESION ENHANCEMENT Public/Granted day:2011-04-14
Information query
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