Invention Grant
US08482183B2 Test substrate and method for measuring contact force 有权
测试基板和测量接触力的方法

Test substrate and method for measuring contact force
Abstract:
A test substrate for measuring contact force and a method for measuring contact force are provided in the technology. The substrate may comprises: a base substrate, and a piezoelectric element provided on a surface of the base substrate. One end of the piezoelectric portion is a detecting voltage input terminal and the other end thereof is a detecting voltage output terminal. According to the technology, the substrate and method for measuring contact force can be used to measure the contact force applied to the substrate by the cleaning apparatus or conveying apparatus, and thus the contact force can be properly controlled and the adverse influence on the substrate from the conveying apparatus or cleaning apparatus can be decreased or eliminated.
Public/Granted literature
Information query
Patent Agency Ranking
0/0