Invention Grant
US08482357B2 Transverse acoustic wave resonator, oscillator having the resonator and method for making the resonator
有权
横波声波谐振器,具有谐振器的振荡器和用于制造谐振器的方法
- Patent Title: Transverse acoustic wave resonator, oscillator having the resonator and method for making the resonator
- Patent Title (中): 横波声波谐振器,具有谐振器的振荡器和用于制造谐振器的方法
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Application No.: US13310687Application Date: 2011-12-02
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Publication No.: US08482357B2Publication Date: 2013-07-09
- Inventor: Bin Xiao , Ping Lv , Wei Hu , Jia-Xin Mei , Gang Li
- Applicant: Bin Xiao , Ping Lv , Wei Hu , Jia-Xin Mei , Gang Li
- Applicant Address: CN Suzhou, Jiangsu Province
- Assignee: Memsensing Microsystems Technology Co., Ltd
- Current Assignee: Memsensing Microsystems Technology Co., Ltd
- Current Assignee Address: CN Suzhou, Jiangsu Province
- Agent Cheng-Ju Chiang
- Priority: CN201110308012 20111012
- Main IPC: H03B5/18
- IPC: H03B5/18

Abstract:
A transverse acoustic wave resonator includes a base, a resonator component, a number of driving electrodes fixed to the base and a number of fixing portions connecting the base and the resonator component. The resonator component is suspended above a top surface of the base and is perpendicular to the base. The driving electrodes are coupling to side surfaces of the resonator component. The resonator component is formed in a shape of an essential regular polygon. The driving electrodes and the resonator component jointly form an electromechanical coupling system for converting capacitance into electrostatic force. Besides, a capacitive-type transverse extension acoustic wave silicon oscillator includes the transverse acoustic wave resonator and a method of fabricating the transverse acoustic wave resonator are also disclosed.
Public/Granted literature
- US20130093527A1 TRANSVERSE ACOUSTIC WAVE RESONATOR, OSCILLATOR HAVING THE RESONATOR AND METHOD FOR MAKING THE RESONATOR Public/Granted day:2013-04-18
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