Invention Grant
- Patent Title: Laser processing apparatus and laser processing method
- Patent Title (中): 激光加工设备和激光加工方法
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Application No.: US12566143Application Date: 2009-09-24
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Publication No.: US08482829B2Publication Date: 2013-07-09
- Inventor: Yuu Takiguchi , Naoya Matsumoto , Norihiro Fukuchi , Takashi Inoue , Tamiki Takemori , Naohisa Mukozaka
- Applicant: Yuu Takiguchi , Naoya Matsumoto , Norihiro Fukuchi , Takashi Inoue , Tamiki Takemori , Naohisa Mukozaka
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: Hamamatsu Photonics K.K.
- Current Assignee: Hamamatsu Photonics K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Agency: Drinker Biddle & Reath LLP
- Priority: JPP2008-256629 20081001
- Main IPC: G03H1/08
- IPC: G03H1/08

Abstract:
A laser processing apparatus 1 includes a laser light source 10, a phase modulation type spatial light modulator 20, a driving unit 21, a control unit 22, and an imaging optical system 30. The imaging optical system 30 may be a telecentric optical system. A storage unit 21A included in the driving unit stores a plurality of basic holograms corresponding to a plurality of basic processing patterns and a focusing hologram corresponding to a Fresnel lens pattern. The control unit 22 arranges in parallel two or more basic holograms selected from the plurality of basic holograms stored in the storage unit 21A, overlaps the focusing hologram with each of the basic holograms arranged in parallel to form the whole hologram, and presents the formed whole hologram to the spatial light modulator 20.
Public/Granted literature
- US20100079832A1 LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD Public/Granted day:2010-04-01
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