Invention Grant
US08482833B2 Micromechanical element mobile along at least one axis of rotation 失效
至少一个旋转轴可移动微机械元件

Micromechanical element mobile along at least one axis of rotation
Abstract:
The invention concerns a micromechanical element including a frame, a moving part rotating inside said frame, about an axis, two torsion beams connecting the moving part to said frame , aligned along the axis and provided with a portion of reinforced width, and stop members arranged on both sides of the reinforced portions, so as to limit the lateral movement of the moving part . According to the invention, the portions of reinforced width are integral with the frame , and the stop members are integral with the moving part.
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