Invention Grant
- Patent Title: Thermally assisted magnetic recording head inspection method and apparatus
- Patent Title (中): 热辅助磁记录头检查方法和装置
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Application No.: US13482065Application Date: 2012-05-29
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Publication No.: US08483035B2Publication Date: 2013-07-09
- Inventor: Kaifeng Zhang , Takenori Hirose , Masahiro Watanabe , Shinji Homma , Tsuneo Nakagomi , Teruaki Tokutomi , Toshihiko Nakata , Takehiro Tachizaki
- Applicant: Kaifeng Zhang , Takenori Hirose , Masahiro Watanabe , Shinji Homma , Tsuneo Nakagomi , Teruaki Tokutomi , Toshihiko Nakata , Takehiro Tachizaki
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- Priority: JP2011-119881 20110530
- Main IPC: G11B7/00
- IPC: G11B7/00 ; G11B5/09
Abstract:
In a method and an apparatus for inspecting a thermally assisted magnetic recording head element, a specimen is mounted on a table movable in a plane of a scanning probe microscope device, evanescent light is generated from a portion of light emission of evanescent light of the specimen, scattered light of the evanescent light is detected by moving the table in the plane while a cantilever of the scanning probe microscope having a probe is vertically vibrated in the vicinity of a surface of the specimen, and an intensity distribution of the evanescent light emitted from the portion of light emission of evanescent light or a surface profile of the portion of light emission of evanescent light of the specimen is inspected using position information of generation of the evanescent light based on the detected scattered light.
Public/Granted literature
- US20120307605A1 Thermally Assisted Magnetic Recording Head Inspection Method and Apparatus Public/Granted day:2012-12-06
Information query
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