Invention Grant
US08483251B2 Group III nitride semiconductor laser diode, and method for producing group III nitride semiconductor laser diode
失效
III族氮化物半导体激光二极管,以及III族氮化物半导体激光二极管的制造方法
- Patent Title: Group III nitride semiconductor laser diode, and method for producing group III nitride semiconductor laser diode
- Patent Title (中): III族氮化物半导体激光二极管,以及III族氮化物半导体激光二极管的制造方法
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Application No.: US13294378Application Date: 2011-11-11
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Publication No.: US08483251B2Publication Date: 2013-07-09
- Inventor: Yohei Enya , Yusuke Yoshizumi , Takashi Kyono , Katsushi Akita , Masaki Ueno , Takamichi Sumitomo , Takao Nakamura
- Applicant: Yohei Enya , Yusuke Yoshizumi , Takashi Kyono , Katsushi Akita , Masaki Ueno , Takamichi Sumitomo , Takao Nakamura
- Applicant Address: JP Osaka-shi
- Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee Address: JP Osaka-shi
- Agency: Venable LLP
- Agent Michael A. Sartori; Tamatane J. Aga
- Priority: JPP2009-114886 20090511
- Main IPC: H01S5/00
- IPC: H01S5/00

Abstract:
Provided is a Group III nitride semiconductor laser diode with a cladding layer capable of providing high optical confinement and carrier confinement. An n-type Al0.08Ga0.92N cladding layer is grown so as to be lattice-relaxed on a (20-21)-plane GaN substrate. A GaN optical guiding layer is grown so as to be lattice-relaxed on the n-type cladding layer. An active layer, a GaN optical guiding layer, an Al0.12Ga0.88N electron blocking layer, and a GaN optical guiding layer are grown so as not to be lattice-relaxed on the optical guiding layer. A p-type Al0.08Ga0.92N cladding layer is grown so as to be lattice-relaxed on the optical guiding layer. A p-type GaN contact layer is grown so as not to be lattice-relaxed on the p-type cladding layer, to produce a semiconductor laser. Dislocation densities at junctions are larger than those at the other junctions.
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