Invention Grant
- Patent Title: Apparatus for inspecting and measuring object to be measured
- Patent Title (中): 用于检测和测量被测物体的装置
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Application No.: US12664749Application Date: 2008-06-13
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Publication No.: US08483444B2Publication Date: 2013-07-09
- Inventor: Tetsuro Aikawa , Yoshinori Satoh , Tatsuya Oodake , Naruhiko Mukai , Hisashi Hozumi , Yasuhiro Yuguchi
- Applicant: Tetsuro Aikawa , Yoshinori Satoh , Tatsuya Oodake , Naruhiko Mukai , Hisashi Hozumi , Yasuhiro Yuguchi
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2007-159142 20070615
- International Application: PCT/JP2008/060843 WO 20080613
- International Announcement: WO2008/153127 WO 20081218
- Main IPC: G06K9/00
- IPC: G06K9/00

Abstract:
An apparatus for inspecting and measuring an object to be measured includes: a distance measurement device having a light projector that projects a two-dimensional optical pattern onto a measurement target of the measurement object, imaging devices disposed in a stereoscopic arrangement that image the measurement object, and a driving device that rotates a posture of at least one of the imaging devices to control a parallax angle between the imaging devices; a working distance control device that controls the driving device and adjusts a position at which optical axes of the imaging devices intersect; and a distance calculation device having a correspondence position calculation device that determines a correspondence position at which the same region is imaged among images of the imaging devices, and a distance calculation devices that calculates a distance to the measurement target of the measurement object based on a calculation result of the calculation device.
Public/Granted literature
- US20100183197A1 APPARATUS FOR INSPECTING AND MEASURING OBJECT TO BE MEASURED Public/Granted day:2010-07-22
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