Invention Grant
US08484757B2 Device for oscillation excitation of an elastic bar fastened on one side in an atomic force microscope
失效
用于在原子力显微镜中固定在一侧的弹性杆的振荡激励装置
- Patent Title: Device for oscillation excitation of an elastic bar fastened on one side in an atomic force microscope
- Patent Title (中): 用于在原子力显微镜中固定在一侧的弹性杆的振荡激励装置
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Application No.: US12063588Application Date: 2006-06-30
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Publication No.: US08484757B2Publication Date: 2013-07-09
- Inventor: Walter Arnold , Kerstin Meder , Ute Rabe
- Applicant: Walter Arnold , Kerstin Meder , Ute Rabe
- Applicant Address: DE Munich
- Assignee: Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung E.V.
- Current Assignee: Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung E.V.
- Current Assignee Address: DE Munich
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: DE102005038245 20050812
- International Application: PCT/EP2006/006382 WO 20060630
- International Announcement: WO2007/019913 WO 20070222
- Main IPC: G01Q60/24
- IPC: G01Q60/24

Abstract:
A device for oscillation excitation of a leaf spring, which is fastened on one side in an atomic force microscope (AFM) and comprises semiconductor material, which has no piezoelectric properties, a free end to which a tip is attached, which is brought into contact with a sample surface to be examined. The present invention has the leaf spring connected at least sectionally to a metal layer to form a Schottky contact, and an electrical voltage or field source is provided, which generates an electrical AC voltage a vicinity or area of the Schottky contact.
Public/Granted literature
- US20110010809A1 DEVICE FOR OSCILLATION EXCITATION OF AN ELASTIC BAR FASTENED ON ONE SIDE IN AN ATOMIC FORCE MICROSCOPE Public/Granted day:2011-01-13
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