Invention Grant
- Patent Title: Device comprising a cantilever and scanning system
- Patent Title (中): 装置包括悬臂和扫描系统
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Application No.: US12952346Application Date: 2010-11-23
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Publication No.: US08484760B2Publication Date: 2013-07-09
- Inventor: Michael Despont , Venkataraman Kartik , Charalampos Pozidis , Deepak Ranjan Sahoo
- Applicant: Michael Despont , Venkataraman Kartik , Charalampos Pozidis , Deepak Ranjan Sahoo
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Eustus D. Nelson
- Priority: EP09176952 20091124
- Main IPC: G03F7/02
- IPC: G03F7/02

Abstract:
A device including a first part and a second part, one of which is a cantilever, the first and second parts being connected to each other and movable relative to each other. The device includes a magnetic element arranged on the first part and configured to provide a magnetic field. The device further includes a magnetization device arranged on the second part and configured to provide an actuation magnetic field which interacts with the magnetic field of the magnetic element, thereby causing or suppressing relative movement of the first and second parts. A scanning system including such a device is also described.
Public/Granted literature
- US20110126329A1 DEVICE COMPRISING A CANTILEVER AND SCANNING SYSTEM Public/Granted day:2011-05-26
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