Invention Grant
US08484760B2 Device comprising a cantilever and scanning system 失效
装置包括悬臂和扫描系统

Device comprising a cantilever and scanning system
Abstract:
A device including a first part and a second part, one of which is a cantilever, the first and second parts being connected to each other and movable relative to each other. The device includes a magnetic element arranged on the first part and configured to provide a magnetic field. The device further includes a magnetization device arranged on the second part and configured to provide an actuation magnetic field which interacts with the magnetic field of the magnetic element, thereby causing or suppressing relative movement of the first and second parts. A scanning system including such a device is also described.
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