Invention Grant
US08484761B2 Method for cost-efficient manufacturing diamond tips for ultra-high resolution electrical measurements and devices obtained thereof
有权
用于超高分辨率电气测量的成本有效的制造金刚石尖端的方法及其获得的装置
- Patent Title: Method for cost-efficient manufacturing diamond tips for ultra-high resolution electrical measurements and devices obtained thereof
- Patent Title (中): 用于超高分辨率电气测量的成本有效的制造金刚石尖端的方法及其获得的装置
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Application No.: US12483160Application Date: 2009-06-11
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Publication No.: US08484761B2Publication Date: 2013-07-09
- Inventor: Thomas Hantschel , Wilfried Vandervorst , Kai Arstila
- Applicant: Thomas Hantschel , Wilfried Vandervorst , Kai Arstila
- Applicant Address: BE Leuven
- Assignee: IMEC
- Current Assignee: IMEC
- Current Assignee Address: BE Leuven
- Agency: Knobbe Martens Olson & Bear LLP
- Main IPC: G01Q70/14
- IPC: G01Q70/14
Abstract:
An atomic force microscopy probe configuration and a method for manufacturing the same are disclosed. In one aspect, the probe configuration includes a cantilever, and a planar tip attached to the cantilever. The cantilever only partially overlaps the planar tip, and extends along a longitudinal direction thereof. The planar tip is of a two-dimensional geometry having at least one corner remote from the cantilever, which corner during use contacts a surface to be scanned.
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