Invention Grant
- Patent Title: Bonding process and bonded structures
- Patent Title (中): 粘结工艺和粘结结构
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Application No.: US13344099Application Date: 2012-01-05
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Publication No.: US08485416B2Publication Date: 2013-07-16
- Inventor: Thorbjorn Ebefors , Edward Kalvesten , Niklas Svedin , Anders Eriksson
- Applicant: Thorbjorn Ebefors , Edward Kalvesten , Niklas Svedin , Anders Eriksson
- Applicant Address: SE Jarfalla
- Assignee: Silex Microsystems AB
- Current Assignee: Silex Microsystems AB
- Current Assignee Address: SE Jarfalla
- Agency: Young & Thompson
- Main IPC: B23K31/02
- IPC: B23K31/02

Abstract:
A sealing and bonding material structure for joining semiconductor wafers having monolithically integrated components. The sealing and bonding material are provided in strips forming closed loops. There are provided at least two concentric sealing strips on one wafer. The strips are laid out so as to surround the component(s) on the wafers to be sealed off when wafers are bonded together. The material in the strips is a material bonding the semiconductor wafers together and sealing off the monolithically integrated components when subjected to force and optionally heating. A monolithically integrated electrical and/or mechanical and/or fluidic and/or optical device including a first substrate and a second substrate, bonded together with the sealing and bonding structure, and a method of providing a sealing and bonding material structure on at least one of two wafers and applying a force and optionally heat to the wafers to join them are described.
Public/Granted literature
- US20120097733A1 NOVEL BONDING PROCESS AND BONDED STRUCTURES Public/Granted day:2012-04-26
Information query
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